Atomic layer deposition of ferromagnetic iron oxide films on three-dimensional substrates with tin oxide nanoparticles

Journal of Crystal Growth

Volumn 343, Issue 1, 2012, Pages 21-27

  Tamm, Aile ^a   Dimri, Mukesh C ^b   Kozlova, Jekaterina ^a   Aidla, Aleks ^a   Tätte, Tanel ^a   Arroval, Tõnis ^a   Mäeorg, Uno ^a   Mändar, Hugo ^a   Stern, Raivo ^b   Kukli, Kaupo ^a,c  

^a UNIVERSITY OF TARTU   (Estonia)

^b NATIONAL INSTITUTE OF CHEMICAL PHYSICS AND BIOPHYSICS   (Estonia)

^c UNIVERSITY OF HELSINKI   (Finland)

Author keywords

A1. Crystal structure; A1. Magnetic field; A2. Growth from vapor; A3. Atomic layer epitaxy; B1. Nanomaterials; B2. Magnetic materials

Indexed keywords

3-D SUBSTRATE; A2. GROWTH FROM VAPOR; ALKOXIDES; AS-DEPOSITED FILMS; ATOMIC LAYER; FERROCENES; FERROMAGNETIC IRON; MAGNETIC IRON OXIDES; OZONE PRECURSORS; PLANAR SUBSTRATE; ROOM TEMPERATURE; SELF-ASSEMBLED; THREE-DIMENSIONAL SUBSTRATES; TIN OXIDE NANOPARTICLES;

ATOMIC LAYER DEPOSITION; COERCIVE FORCE; IRON COMPOUNDS; IRON OXIDES; MAGNETIC FIELDS; MAGNETIC MATERIALS; NANOMAGNETICS; NANOPARTICLES; ORGANOMETALLICS; OXIDE FILMS; OZONE; SATURATION MAGNETIZATION; SILICON; SILICON COMPOUNDS; THREE DIMENSIONAL; TIN; TIN OXIDES; VAPORS;

SUBSTRATES;

EID: 84858000627     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2011.09.062     Document Type: Article

References (34)

1. B.S. Lim, A. Rahtu, and R.G. Gordon Nature Materials 2 2003 749
2. V. Pore, M. Dimri, H. Khanduri, R. Stern, J. Lu, L. Hultman, K. Kukli, M. Ritala, and M. Leskelä Thin Solid Films 519 2011 3318
3. A.B.F. Martinson, M.J. DeVries, J.A. Libera, S.T. Christensen, J.T. Hupp, M.J. Pellin, and J.W. Elam Journal of Physical Chemistry C 115 2011 4333
4. Y.T. Chong, E.M.Y. Yau, K. Nielsch, and J. Bachmann Chemistry of Materials 22 2010 6506
5. K.R. Pirota, D. Navas, M. Hernández-Vélez, K. Nielsch, and M. Vàzquez Journal of Alloys and Compounds 369 2004 18
6. K. Nielsch, F.J. Castaño, C.A. Ross, and R. Krishnan Journal of Applied Physics 98 2005 034318
7. K. Pitzschel, J.M.M. Moreno, J. Escrig, O. Albrecht, K. Nielsch, and J. Bachmann ACS Nano 3 2009 3463
8. O. Albrecht, R. Zierold, C. Patzig, J. Bachmann, C. Sturm, B. Rheinländer, M. Grundmann, D. Görlitz, B. Rauschenbach, and K. Nielsch Physica Status Solidi B 247 2010 1365
9. B.M. Klahr, A.B.F. Martinson, and T.W. Hamann Langmuir 27 2011 461
10. I.L. Soroka, M. Rooth, J. Lu, M. Boman, P. Svedlindh, J.-O. Carlsson, and A. Hårsta Journal of Applied Physics 106 2009 084313
11. M. Rooth, A. Johansson, K. Kukli, J. Aarik, M. Boman, and A. Hårsta Chemical Vapour Deposition 14 2008 67
12. J. Bachmann, J. Escrig, K. Pitzschel, J.M.M. Moreno, J. Jing, D. Görlitz, D. Altbir, and K. Nielsch Journal of Applied Physics 105 2009 07B521
13. J. Aarik, A. Aidla, A.-A. Kiisler, T. Uustare, and V. Sammelselg Thin Solid Films 340 1999 110
14. I.M. Thomas, US patent 3,946,0,56, 1976.
15. G. Kelp, T. Tätte, U. Mäeorg, S. Pikker, A. Tamm, M. Paalo, EP 701 52, 2010.
16. G. Kelp, S. Pikker, R. Lõhmus, H. Mändar, A. Rozhin, V. Kiisk, U. Mäeorg, M. Natali, T. Tätte, in preparation.
17. R.W.J. Scott, N. Coombs., and G.A. Ozin Journal of Materials Chemistry 13 2003 969
18. O.N. Shebanova, and P. Lazor Journal of Solid State Chemistry 174 2003 424
19. R. Waser, and M. Aono Nature Materials 6 2007 833
20. Y. Suzuki Annual Review of Materials Research 31 2001 265
21. T.R. Hart, S.B. Adams, H. Tempkin, in: M. Balkanski, R. Leite, S. Porto (Eds.), Proceedings of the 3rd International Conference, Light Scattering in Solids, Flammarion, Paris, 1976, p. 259.
22. G.A. Ferguson, and M. Hass Physical Review 112 1958 1130
23. K.S.K. Varadwaj, M.K. Panigrahi, and J. Ghose J. Solid State Chemistry. 177 2004 4286
24. R.G. Bulgakov, L.I. Sharapova, G.L. Sharipov, and G.G. Bikhaeva Russian Chemical Bulletin 48 1999 790
25. T. Takai, and H.A. Laitinen Surface Technology 18 1983 123
26. G. Schikorr Zeitschrift fur Anorganische Allgemeine Chemie 212 1933 33
27. K. Nakatsuka, Y. Oda, T. Hirose, and F. Hasegawa Shigen to Sozai (Journal of the Mining and Materials Processing Institute of Japan) 111 1995 1027
28. N.R. Smart, D.J. Blackwood, and L. Werme Corrosion 58 2002 627
29. J. Tuček, R. Zbořil, A. Namai, and S. Ohkoshi Chemistry of Materials 22 2010 6483
30. M. Tadić, D. Marković, V. Spasojević, V. Kusigerski, M. Remškar, J. Pirnat, and Z. Jagli Journal of Alloys and Compounds. 441 2007 291
31. D.T. Margulies, F.T. Parker, F.E. Spada, R.S. Goldman, J. Li, R. Sinclair, and A.E. Berkowitz Physical Review B 53 1996 9175
32. J.D. Uribe, J. Osorio, C.A. Barrero, D. Girata, A.L. Morales, and A. Hoffmann Microelectronics Journal 39 2008 1391
33. D. Tripathy, A.O. Adeyeye, and C.B. Boothroyed Journal of Applied Physics 99 2006 08J105
34. A. Sundaresan, and C.N.R. Rao Nano Today 4 2009 96