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Volumn 51, Issue 2 PART 2, 2012, Pages
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Fabrication of high performance ion-sensitive field-effect transistors using an engineered sensing membrane for bio-sensor application
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Author keywords
[No Author keywords available]
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Indexed keywords
DRIFT RATES;
GATE INSULATOR;
HIGH-K MATERIALS;
HYSTERESIS VOLTAGE;
METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR;
ON/OFF CURRENT RATIO;
PH SENSITIVITY;
SENSING LAYERS;
SENSING MEMBRANES;
SENSING PROPERTY;
SIGNAL TO NOISE;
SUBTHRESHOLD SWING;
BIOSENSORS;
HAFNIUM OXIDES;
ION SENSITIVE FIELD EFFECT TRANSISTORS;
MOSFET DEVICES;
PH SENSORS;
SILICON COMPOUNDS;
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EID: 84857467922
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.51.02BL05 Document Type: Article |
Times cited : (10)
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References (15)
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