Optimized Cu-contacted Si nanowire anodes for Li ion batteries made in a production near process

ECS Transactions

Volumn 33, Issue 27, 2010, Pages 131-141

  Foll H ^a   Carstensen, J ^a   Ossei Wusu, E ^a   Cojocaru, A ^a   Quiroga Gonzalez E ^a   Neumann, G ^b  

^a UNIVERSITY OF KIEL   (Germany)

^b FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ENERGY STORAGE; ETCHING; NANOWIRES; SILICON WAFERS; SUBSTRATES;

CYCLE STABILITY; MASS PRODUCTION; OPTIMIZED GEOMETRIES; OVER-ETCHING; PROCESS CHAIN; PROCESS WINDOW; PROCESSING TIME; SI SUBSTRATES;

LITHIUM-ION BATTERIES;

EID: 84857428964     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3565509     Document Type: Conference Paper

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