Indium oxide ALD using cyclopentadienyl indium and mixtures of H 2O and O2

ECS Transactions

Volumn 41, Issue 2, 2011, Pages 147-155

  Elam, J W ^a   Libera, J A ^a   Hryn, J N ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; FILM PREPARATION;

CRYSTALLINE PHASE TRANSITION; CYCLOPENTADIENYLS; DEPOSITION TEMPERATURES; EX SITU; FILM STRUCTURE; FOURIER TRANSFORM INFRA REDS; INDIUM OXIDE;

INDIUM COMPOUNDS;

EID: 84857287551     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3633663     Document Type: Conference Paper

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