Deposition of ITO thin films onto PMMA substrates for waveguide based biosensing devices

Journal of Nano Research

Volumn 17, Issue , 2012, Pages 75-83

  Azevedo, S ^a   Dieguez L ^b,c   Carvalho, P ^a   Carneiro, J O ^a   Teixeira, V ^a   Martinez E ^b,d   Samitier, J ^b,c,d  

^a UNIVERSITY OF MINHO   (Portugal)

^b INSTITUTE FOR BIOENGINEERING OF CATALONIA IBEC   (Spain)

^c UNIVERSITY OF BARCELONA   (Spain)

^d BIOMATERIALES Y NANOMEDICINA CIBER BBN   (Spain)

Author keywords

ITO thin films; PMMA sheets; Waveguide biosensing devices

Indexed keywords

BIOSENSING DEVICES; CONDUCTING OXIDES; DC MAGNETRON SPUTTERING; ELECTROCHEMICAL MEASUREMENTS; ENHANCED PERFORMANCE; INNOVATIVE DESIGN; ITO THIN FILMS; MULTILAYER STRUCTURES; OVERALL PROPERTIES; PMMA SHEETS; POLYMERIC SUBSTRATE; PRODUCTION COST; SENSOR CHIPS; SILICON-BASED; SUBSTRATE TEMPERATURE;

BIOSENSORS; DEPOSITION; DESIGN; FILM PREPARATION; OPTICAL MULTILAYERS; THIN FILMS; VAPOR DEPOSITION; WAVEGUIDES;

SUBSTRATES;

EID: 84857224664     PISSN: 16625250     EISSN: 16619897     Source Type: Journal    
DOI: 10.4028/www.scientific.net/JNanoR.17.75     Document Type: Article

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