Microlens for uncooled infrared array sensor

IEEJ Transactions on Sensors and Micromachines

Volumn 132, Issue 2, 2012, Pages 42-47

  Yamazaki, Ryo ^a   Obana, Akimitsu ^a   Kimata, Masafumi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Etch back; Gray scale lithography; Infrared sensor; Microlens; Uncooled

Indexed keywords

INFRARED DETECTORS; INFRARED RADIATION; PHOTORESISTS;

GRAY-SCALE LITHOGRAPHY; INFRA-RED SENSOR; MICRO-LENS; PHOTOLITHOGRAPHY TECHNOLOGY; SENSITIVITY IMPROVEMENTS; SILICON MICROLENS; UNCOOLED; UNCOOLED INFRARED;

MICROLENSES;

EID: 84856648761     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.132.42     Document Type: Conference Paper

References (4)

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3. K. Fujikawa, G. Hirakawa, T. Shiono, and K. Nomura : "Optical properties of a Si binary optic microlens for infrared ray", Proc. MEMS, pp.360-365 (1997)
4. M. Ohira, Y. Koyama, F. Aita, S. Sasaki, M. Oba, T. Takahata, I. Shimoyama, and M. Kimata : "Micro mirror arrays for improved sensitivity of thermopile infrared sensors", Proc. MEMS, pp.708-711 (2011)