Micro mirror arrays for improved sensitivity of thermopile infrared sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 708-711

  Ohira, M ^a   Koyama, Y ^a   Aita, F ^a   Sasaki, S ^a   Oba, M ^a   Takahata, T ^b   Shimoyama, I ^b   Kimata, M ^c  

^a OMRON CORPORATION   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENT SIZES; ETCHING DEPTH; FABRICATION METHOD; IMPROVED METHODS; INFRA-RED SENSOR; MASK OPENING; MICROMIRROR ARRAY;

ASPECT RATIO; INFRARED DETECTORS; INFRARED RADIATION; MECHANICAL ENGINEERING; MECHANICS; MEMS; MIRRORS; REACTIVE ION ETCHING; SENSORS; TERNARY SYSTEMS;

THERMOPILES;

EID: 79953772370     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734523     Document Type: Conference Paper

References (6)

1. M. Kimata: "Infrared Imaging", in Comprehensive Microsystems edited by Y. B. Gianchandai, O. Tabata, and H. Zappe, Elsevier, p113-163 (2007)
2. T. Ishikawa, M. Ueno, K. Endo, Y. Ohta, J. Nakanishi, K. Kasasayama, H. Yagi, T. Sone, and M. Kimata, Proc. SPIE, Vol.4130, 152, 2000
3. H. G. Erhardt, J. Kane and L. S. O'Hara, SPIE Vol.501 State of the Art Imaging Arrays and Their Applications (1984) pp. 165-172.
4. C. S. Lee, C. H. Han, Sensors and Actuators A88 2001 pp. 87-90
5. T. Ohori, T. Takahata, E. Iwase, K. Matsumoto, and I. Shimoyama, Proc. the 24th Symposium on Sensors, Micromachines & Applied Systems, 15, 2007
6. M. Ohira, Y. Koyama, F. Aita, S. Sasaki, M. Oba, T. Takahata, I. Shimoyama and M. Kimata, Proc. the 26th Symposium on Sensors, Micromachines & Applied Systems, 328, 2009