Optical properties of a Si binary optic microlens for infrared ray

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 360-365

  Fujikawa, Kazuhiko ^a   Hirakawa, Goichi ^a   Shiono, Teruhiro ^a   Nomura, Koji ^a  

^a Matsushita Electronic Components Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DENSITY MEASUREMENT (OPTICAL); DIFFRACTION GRATINGS; INFRARED RADIATION; OPTICAL SENSORS; PHOTORESISTS; PRESSURE MEASUREMENT; PYROELECTRICITY; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

PYRO-ELECTRIC INFRARED SENSOR; SILICON BINARY OPTIC MICROLENS;

OPTICAL INSTRUMENT LENSES;

EID: 0030697731     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)