SCOPUS 정보 검색 플랫폼

Volumn 37, Issue 2, 2012, Pages 157-159

Plasmonic properties of aluminum nanorings generated by double patterning

(7) Lehr, Dennis a Dietrich, Kay a Helgert, Christian a Käsebier, Thomas a Fuchs, Hans Jörg a Tünnermann, Andreas a Kley, Ernst Bernhard a

a FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN TOOL; DOUBLE PATTERNING; EFFECTIVE MATERIAL PROPERTY; ETCHING OF METALS; ETCHING PROCESS; FEATURE SIZES; GENERAL CLASS; NANO-STRUCTURED; NANOFABRICATION TECHNIQUES; PLASMONIC PROPERTIES; REALISTIC SIMULATION; WRITING SPEED;

ALUMINUM; ELECTRON BEAMS; ETCHING; NANORINGS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PLASMONS;

COMPUTER SIMULATION;

EID: 84856284892 PISSN: 01469592 EISSN: 15394794 Source Type: Journal
DOI: 10.1364/OL.37.000157 Document Type: Article

Times cited : (28)

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