Study of selectivity of NO 2 sensors composed of WO 3 and MnO 2 thin films grown by radio frequency sputtering

Sensors and Actuators, B: Chemical

Volumn 161, Issue 1, 2012, Pages 914-922

  Zhang, Chao ^a   Boudiba, Abdelhamid ^a   Navio, Cristina ^a   Olivier, Marie Georges ^a   Snyders, Rony ^a,b   Debliquy, Marc ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

Manganese oxide; Nitrogen dioxide sensor; Ozone filter; Radio frequency sputtering; Tungsten oxide

Indexed keywords

CHEMICAL COMPOSITIONS; CRYSTALLINE PHASE; MOIST AIR; NITROGEN DIOXIDE SENSOR; RADIO FREQUENCY SPUTTERING; TRILAYER STRUCTURE; TUNGSTEN OXIDE; WORKING TEMPERATURES;

MANGANESE; NITROGEN OXIDES; OXIDES; OZONE; RADIO; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; SENSORS; TUNGSTEN; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

MANGANESE OXIDE;

EID: 84856213285     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.11.062     Document Type: Article

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