Fabrication and characterization of Si nano-columns by femtosecond laser

Journal of Nano Research

Volumn 16, Issue , 2012, Pages 15-20

  Ghalehbeygi, Omid Tayefeh ^a   Kara, Vural ^a   Trabzon, Levent ^a   Akturk, Selcuk ^a   Kizil, Huseyin ^a  

^a ISTANBUL TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Femtosecond laser ablation; Silicon nano columns

Indexed keywords

CHEMICAL ETCHING; FEMTO-SECOND LASER; FEMTOSECOND LASER ABLATION; FS LASER PULSE; IN-VACUUM; LASER BEAM PROFILE; MICRO-SPIKES; NANO-COLUMNS; PROCESS PARAMETERS; SEM OBSERVATION; SILICON SURFACES;

ABLATION; CHLORINE; LASER ABLATION; LASER BEAMS; SULFUR HEXAFLUORIDE; ULTRASHORT PULSES;

SILICON;

EID: 84856091919     PISSN: 16625250     EISSN: 16619897     Source Type: Journal    
DOI: 10.4028/www.scientific.net/JNanoR.16.15     Document Type: Article

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