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Volumn 58, Issue 7, 2007, Pages 666-669

A cross-sectional TEM sample preparation method for films deposited on metallic substrates

Author keywords

Cross sectional TEM sample preparation; Films; Metallic substrate; Superlattice film

Indexed keywords

DEPOSITION; METALS; SUBSTRATES; SUPERLATTICES; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

EID: 34247868084     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2006.07.016     Document Type: Article
Times cited : (17)

References (5)
  • 1
    • 0031001597 scopus 로고    scopus 로고
    • Cross-section TEM sample preparation of multilayer and poorly adhering films
    • Weaver L. Cross-section TEM sample preparation of multilayer and poorly adhering films. Microsc Res Tech 36 (1997) 368-371
    • (1997) Microsc Res Tech , vol.36 , pp. 368-371
    • Weaver, L.1
  • 2
    • 0036389865 scopus 로고    scopus 로고
    • Transmission electron microscopy for the semi-conductor industry
    • Zhang H. Transmission electron microscopy for the semi-conductor industry. Micron 33 6 (2002) 515-521
    • (2002) Micron , vol.33 , Issue.6 , pp. 515-521
    • Zhang, H.1
  • 3
    • 0942290077 scopus 로고    scopus 로고
    • The coherent growth and mechanical properties of AlN/VN multilayers
    • Li G., Lao J., Tian J., Han Z., and Gu M. The coherent growth and mechanical properties of AlN/VN multilayers. J Appl Phys 95 (2004) 92-96
    • (2004) J Appl Phys , vol.95 , pp. 92-96
    • Li, G.1    Lao, J.2    Tian, J.3    Han, Z.4    Gu, M.5
  • 5
    • 24144489507 scopus 로고    scopus 로고
    • Coherent epitaxial growth and superhardness effects of c-TiN/h-TiB2 nanomultilayers
    • Mei F., Shao N., Wei L., Dong Y., and Li G. Coherent epitaxial growth and superhardness effects of c-TiN/h-TiB2 nanomultilayers. Appl Phys Lett 87 (2005) 011906
    • (2005) Appl Phys Lett , vol.87 , pp. 011906
    • Mei, F.1    Shao, N.2    Wei, L.3    Dong, Y.4    Li, G.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.