Submicron-patterning of bulk titanium by nanoimprint lithography and reactive ion etching

Nanotechnology

Volumn 23, Issue 6, 2012, Pages

  Domanski, M ^a   Luttge, R ^a   Lamers, E ^b   Walboomers, X F ^b   Winnubst, L ^a   Jansen, J A ^b   Gardeniers, J G E ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b RADBOUD UNIVERSITY MEDICAL CENTER   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BIOFUNCTIONALITY; BIOLOGICAL STUDIES; BULK TITANIUM; CYTOTOXICITY ASSAYS; DIRECT WRITE; ENDOSSEOUS IMPLANT; FABRICATION PROCESS; IMPLANTOLOGY; IN-VIVO; LASER INTERFERENCE LITHOGRAPHY; NANO PATTERN; NANOGROOVES; NANOMACHINING; NANOPATTERNED SURFACES; PATTERN TRANSFERS; SCALABLE METHODS; TITANIUM SUBSTRATES; X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES;

CHLORINE; NANOIMPRINT LITHOGRAPHY; SCALABILITY; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

REACTIVE ION ETCHING;

NANOMATERIAL; SILICON; TITANIUM;

ARTICLE; CHEMISTRY; METHODOLOGY; NANOTECHNOLOGY; ULTRASTRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOSTRUCTURES; NANOTECHNOLOGY; PHOTOELECTRON SPECTROSCOPY; SILICON; TITANIUM;

EID: 84855938078     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/6/065306     Document Type: Article

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