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Thin Solid Films

Volumn 520, Issue 6, 2012, Pages 2316-2320

Crystallization behavior and mechanical properties of erbium oxide coatings fabricated by pulsed magnetron sputtering

(5) Li, Xinlian a Wu, Ping a Qiu, Hong a Chen, Sen a Song, Binbin a

a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING (China)

Author keywords

Annealing; Elastic modulus; Erbium oxide; Hardness; Monoclinic; Pulsed magnetron sputtering

Indexed keywords

COATING STRUCTURES; CRYSTALLIZATION BEHAVIOR; CUBIC PHASE; ERBIUM OXIDE; HARDNESS AND ELASTIC MODULUS; LENGTH DISTRIBUTIONS; MID-FREQUENCY; MONOCLINIC; MONOCLINIC PHASE; PULSED MAGNETRON SPUTTERING; SPUTTERING POWER; SUBSTRATE TEMPERATURE;

ANNEALING; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; BOND LENGTH; ELASTIC MODULI; ERBIUM; HARDNESS; MAGNETRON SPUTTERING; NANOINDENTATION; PROTECTIVE COATINGS; THERMODYNAMIC STABILITY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

PHASE STABILITY;

EID: 84855936993 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.09.053 Document Type: Article

Times cited : (23)

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