Ultra-low gas sensing utilizing metal oxide thin films

Vacuum

Volumn 86, Issue 5, 2012, Pages 495-506

  Kiriakidis, G ^a,b   Moschovis, K ^a,b   Kortidis, I ^a,b   Binas, V ^a  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^b UNIVERSITY OF CRETE   (Greece)

Author keywords

Aerosol spray pyrolysis; Conductivity; Gas sensor; Metal oxide; Sputtering; Surface acoustic waves; Thin films; Ultra low ozone sensing

Indexed keywords

AEROSOL SPRAY PYROLYSIS; GAS SENSOR; METAL OXIDE; SURFACE ACOUSTIC WAVES; ULTRA LOW OZONE SENSING;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ATMOSPHERIC AEROSOLS; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; GAS DETECTORS; GAS SENSING ELECTRODES; METALLIC COMPOUNDS; OZONE; OZONE LAYER; SPRAY PYROLYSIS; SPUTTERING; THIN FILMS; ZINC OXIDE;

OXIDE FILMS;

EID: 84855887395     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.10.013     Document Type: Article

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