The SmartEFTEM-SI method: Development of a new spectrum-imaging acquisition scheme for quantitative mapping by energy-filtering transmission electron microscopy

Ultramicroscopy

Volumn 113, Issue , 2012, Pages 106-119

  Watanabe, Masashi ^a   Allen, Frances I ^b,c  

^a Lehigh University   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

CCD dark current correction; EELS quantification; EFTEM SI spectral processing; Multiple frame acquisition; Spatial drift correction

Indexed keywords

ABSOLUTE NUMBER; DATA SETS; EFTEM-SI SPECTRAL PROCESSING; ELEMENTAL MAPS; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPIES; LARGE FIELD OF VIEWS; LOW LOSS; MULTIPLE-FRAME; MULTIPLE-FRAME ACQUISITION; QUANTITATIVE MAPPING; SPECTRAL PROCESSING; THICKNESS CORRECTION;

ATOMS;

TRANSMISSION ELECTRON MICROSCOPY;

BORON; GERMANIUM; OXYGEN;

ANALYTIC METHOD; ARTICLE; DATA PROCESSING; ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY; IMAGE ANALYSIS; PROCESS DEVELOPMENT; QUANTITATIVE ANALYSIS; THICKNESS;

EID: 84855802160     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2011.10.014     Document Type: Article

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