Positive resist for UV and X-ray lithography synthesized through sol-gel chemistry

Journal of Sol-Gel Science and Technology

Volumn 60, Issue 3, 2011, Pages 400-407

  Brigo, Laura ^a   Grenci, Gianluca ^b   Carpentiero, Alessandro ^b   Pistore, Anna ^a   Tormen, Massimo ^b   Guglielmi, Massimo ^a   Brusatin, Giovanna ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b IOM CNR LABORATORIO TASC   (Italy)

Author keywords

Functional material; Hybrid organic inorganic material; Positive resist; Sol gel processing; UV lithography; X ray lithography

Indexed keywords

ACID CATALYSIS; CROSS-LINKED FILMS; DEVICE MATERIALS; ELECTRO-OPTICAL; FABRICATION PROCESS; FTIR SPECTROSCOPY; FUNCTIONAL SYSTEMS; HYBRID ORGANIC-INORGANIC MATERIALS; LATERAL DIMENSION; MICRON SCALE; ORGANIC FUNCTIONALITIES; POSITIVE RESISTS; POSITIVE TONE; POSITIVE-TONE RESISTS; SACRIFICIAL LAYER; SILICON ALKOXIDES; SOL-GEL CHEMISTRY; SOL-GEL PROCESSING; SOL-GEL SYSTEMS; STRUCTURAL MODIFICATIONS; TRIETHOXYSILYL; UV LITHOGRAPHY; UV- AND; UV-VIS SPECTROSCOPY;

BENZENE; BENZENE REFINING; CROSSLINKING; FUNCTIONAL MATERIALS; GELS; IRRADIATION; LITHOGRAPHY; SOL-GELS; SOLS; SPECTROSCOPIC ELLIPSOMETRY; ULTRAVIOLET SPECTROSCOPY; ULTRAVIOLET VISIBLE SPECTROSCOPY; X RAY LITHOGRAPHY; X RAYS;

SOL-GEL PROCESS;

EID: 84855666676     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-011-2512-x     Document Type: Article

References (21)

1. Sanchez C, Rozes L, Ribot F, Laberty-Robert C, Grosso D, Sassoye C, Boissiere C, Nicole L (2010) "Chimie douce": a land of opportunities for the designed construction of functional inorganic and hybrid organic-inorganic nanomaterials. C R Chimie 13: 3-39
2. Brinker CJ, Scherer GW (1990) Sol-gel science: the physics and chemistry of sol-gel processing. Academic Press, San Diego
3. Sanchez C, Julian B, Belleville P, Popall M (2005) Applications of hybrid organic-inorganic nanocomposites. J Mater Chem 15:3559-3592 (Pubitemid 41417051)
4. Della Giustina G, Brusatin G, Guglielmi M, Romanato F (2007) Direct nanopattern of hybrid sol-gel films. Mater Sci Eng C 27: 1382-1385 (Pubitemid 47211877)
5. Brusatin G, Della Giustina G, Romanato F, Guglielmi M (2008) Design of hybrid sol-gel films for direct X-ray and electron beam nanopatterning. Nanotechnology 19:175306
6. Zhang H, Wang J, Li L, Song Y, Zhao M, Jian X (2008) Synthesis of liquid polysilisiquioxane resins and properties of cured films. Thin Solid Films 517:857-862
7. Falcaro P, Malfatti L, Vaccari L, Amenitsch H, Marmiroli B, Grenci G, Innocenzi P (2009) Fabrication of advanced functional devices combining soft chemistry with X-ray lithography in one step. Adv Mater 21:4932-4936
8. Shea KJ, Loy DA (2001) Bridged polysilsesquioxanes. Molecular-engineered hybrid organic-inorganic materials. Chem Mater 13:3306-3319 (Pubitemid 33009280)
9. Loyt DA, Shea KJ (1995) Bridged polysilsesquioxanes. Highly porous hybrid organic-inorganic materials. Chem Rev 95: 1431-1442
10. Cerveau G, Corriu RJP, Framery E (2001) Nanostructured organic-inorganic hybrid materials: kinetic control of the texture. Chem Mater 13:3373-3388 (Pubitemid 33009282)
11. Brigo L, Pistore A, Grenci G, Carpentiero A, Romanato F, Brusatin G (2010) New hybrid organic-inorganic sol-gel positive resist. Microelectron Eng 87:947-950
12. Brigo L, Grenci G, Baù L, Carpentiero A, Mancin F, Romanato F, Tormen M, Guglielmi M, Brusatin G Hybrid porous resist with sensing functionality. Microelectron Eng doi 10.1016/j.mee.2010. 12.009 (in press)
13. Lin J, Brown CW (1997) Sol-gel glass as a matrix for chemical and biochemical sensing. Trends Anal Chem 16:200-211 (Pubitemid 27208446)
14. Dabrowski A, Barczak M, Robens E, Stolyarchuk NV, Yurchenko GR, Matkovskii OK, Zub YL (2007) Ethylene and phenylene bridged polysilsesquioxanes functionalized by amine and thiol groups as adsorbents of volatile organic compounds. Appl Surf Sci 253:5747-5751 (Pubitemid 46584742)
15. Pistore A, Guglielmi M, Brusatin G, Kang HK, Ferraris C, Romanato F (2010) Active sol-gel thin film on nanostructured plasmonic surface. Solid State Sci 12:1898-1902
16. Arduini M, Pistore A, Mancin F, Brusatin G Halide anions optical sensors prepared with bridged silane precursors (in preparation)
17. Azzam RMA, Bashara NM (1987) Ellipsometry and polarized light. North-Holland, Amsterdam
18. Romanato F, Di Fabrizio E, Vaccari L, Altissimo M, Cojoc D, Businaro L, Cabrini S (2001) LILIT beamline for soft and deep X-ray lithography at Elettra. Microelectron Eng 57-58:101-107 (Pubitemid 32798176)
19. Sato T, Nagayama N, Yokoyama M (2003) Refractive index modification of polysilane films by UV-light irradiation. J Photopolym Sci Technol 16:679-684
20. Harvey MC, Nebergall WH (1962) The silicon-phenyl asymmetrical stretching vibration. Appl Spectrosc 16:12-14
21. Thompson A et al (2011) X-ray data booklet. Center for X-Ray Optics And Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley