Hybrid porous resist with sensing functionality

Microelectronic Engineering

Volumn 88, Issue 8, 2010, Pages 1913-1916

  Brigo, L ^a   Grenci, G ^b   Ba, L ^a   Carpentiero, A ^b   Mancin, F ^a   Romanato, F ^a,b,c   Tormen, M ^b   Guglielmi, M ^a   Brusatin, G ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b IOM CNR LABORATORIO TASC   (Italy)

^c Laboratory for Nanofabrication of Nanodevices   (Italy)

Author keywords

Hybrid material; Optical sensor; Porosity; Positive resist; Sol gel processing; X ray lithography

Indexed keywords

CROSSLINKING; HYBRID MATERIALS; OPTICAL SENSORS; ORGANIC-INORGANIC MATERIALS; PHOTORESISTS; POROSITY; SOL-GELS; X RAY LITHOGRAPHY; X RAYS;

FLUORESCENCE PROPERTIES; HYBRID ORGANIC-INORGANIC; OPTICAL MICRODEVICES; POLYSILSESQUIOXANES; POSITIVE RESISTS; SELECTIVE DISSOLUTION; SINGLE-STEP PROCESS; SOL-GEL PROCESSING;

SOL-GEL PROCESS;

EID: 79960073270     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.009     Document Type: Article

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