TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

Microelectronic Engineering

Volumn 91, Issue , 2012, Pages 167-173

  Wei, Changzheng ^a   Zhou, Wei ^a   Wang, Quan ^a   Xia, Xiaoyuan ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Accelerometer; Automotive sensor; Piezoresistance; Pressure sensor; Self testing; Surface micromachining

Indexed keywords

AUTOMOTIVE SENSORS; ELECTROPLATED METALS; MONITOR SYSTEM; MONOLITHIC COMPOSITE; MONOLITHIC INTEGRATION; ON CHIPS; PIEZORESISTANCE; PIEZORESISTIVE ACCELEROMETERS; PIEZORESISTIVE PRESSURE SENSORS; SELF-TESTING; SINGLE CHIPS; SURFACE MICROMACHINING PROCESS; TIRE-PRESSURE MONITORING SYSTEMS;

ACCELEROMETERS; COMPOSITE MICROMECHANICS; ELECTROSTATICS; METAL TESTING; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; PRESSURE SENSORS;

MONITORING;

EID: 84855559356     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.10.001     Document Type: Article

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