Fabrication and characterization of nickel-induced laterally crystallized polycrystalline silicon piezo-resistive sensors

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 281-285

  Li, Xinxin ^a   Zohar, Yitshak ^a   Wong, Man ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; MICROMACHINING; NICKEL; POLYCRYSTALLINE MATERIALS; PRESSURE TRANSDUCERS; SILICON SENSORS;

METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); PIEZO-RESISTIVE SENSORS; PRESSURE SENSORS;

MICROSENSORS;

EID: 0033740822     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00361-1     Document Type: Article

References (10)

1. Petersen K.E. Silicon as a mechanical material. Proceedings of IEEE. Vol. 70:1982;420-457. May.
2. Guckel H. Surface micro-machined pressure transducers. Sensors and Actuators, A. 28:1991;133-146.
3. Mosser V., Suski J., Goss J., Obermeier E. Piezo-resistive pressure sensors based on poly-crystalline silicon. Sensors and Actuators, A. 28:1991;113-132.
4. Le Berre M., Lavitska E., Maryamova I., Voronin V. Piezo-resistive properties of boron-doped PECVD micro- and poly-crystalline silicon films. Mater. Res. Soc. Symp. Proc. Vol. 343:1994;733-738. Materials Research Society.
5. Lu N.C.C., Gerzberg L., Meindl J.D. A quantitative model of the effects of grain size on the resistivity of polycrystalline silicon resistors. IEEE Electron Device Letters. Vol. EDL-1:1980;38-41. March.
6. Druzhinin A., Lavitska E., Maryamova I., Voronin V. Mechanical sensors based on laser-recrystallized SOI structures. Sensors and Actuators, A. 61:1997;400-404.
7. Voronin V.A., Druzhinin A.A., Marjamova I.I., Kostur V.G., Pankov Ju.M. Laser-recrystallized polysilicon layers in sensors. Sensors and Actuators, A. 30:1992;143-147.
8. Jin Z., Bhat G.A., Yeung M., Kwok H.S., Wong M. Nickel-induced crystallization of amorphous silicon thin film. Journal of Applied Physics. Vol. 84(1):1998;194-200. July.
9. Jin Z., Moulding K., Kwok H.S., Wong M. The effects of extended heat treatment on Ni-induced lateral crystallization of amorphous silicon thin film. IEEE Trans. Electron Devices. Vol. 46(1):1999;78-82. Jan.
10. Li X.X., Lee W.Y., Wong M., Zohar Y. Constriction micro-devices with integrated pressure sensors for flow separation study. Technical Digest of the 10th International Conference on Solid-State Sensors and Actuators - Transducers '99, Sendai, Japan, 7-10 June:1999;882-885.