Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 362-366

  Malhaire, C ^a   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

Finite element modelling; Gauge; MEMS; Polysilicon; Pressure sensor; Reliability

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; METALLIZING; MICROELECTROMECHANICAL DEVICES; PRESSURE MEASUREMENT; SENSORS;

PRESSURE SENSORS;

POLYSILICON;

EID: 0037416659     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01234-8     Document Type: Conference Paper

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