Influence of humidity conditions on the capacitive and resistive response of an Al/VOPc/Pt co-planar humidity sensor

Measurement Science and Technology

Volumn 23, Issue 1, 2012, Pages

  Aziz, Fakhra ^a,b   Hassan Sayyad, M ^a   Sulaiman, K ^b   Majlis, B H ^c   Karimov, Khassan S ^a   Ahmad, Zubair ^a   Sugandi, G ^c  

^a GIK INSTITUTE OF ENGINEERING SCIENCES AND TECHNOLOGY   (Pakistan)

^b UNIVERSITY OF MALAYA   (Malaysia)

^c INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

Atomic force microscopy; humidity sensor; photolithography; vanadyl phthalocyanine; x ray diffraction

Indexed keywords

ALUMINUM; ALUMINUM COATINGS; ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; CAPACITIVE SENSORS; CHARACTERIZATION; ELECTRODES; HUMIDITY SENSORS; NITROGEN COMPOUNDS; PHOTOLITHOGRAPHY; PLATINUM; SUBSTRATES; VANADIUM COMPOUNDS; X RAY DIFFRACTION;

ASYMMETRIC ELECTRODES; FABRICATION AND CHARACTERIZATIONS; GLASS SUBSTRATES; HUMIDITY CONDITIONS; INFLUENCE OF HUMIDITY; MORPHOLOGICAL INFORMATION; ORGANIC SEMICONDUCTING MATERIALS; VANADYL PHTHALOCYANINE;

THIN FILMS;

EID: 84855364153     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/23/1/014001     Document Type: Article

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