Application of a dual-spectral-range, divergent-beam spectroscopic ellipsometer for high-speed mapping of large-area, laterally-inhomogeneous, photovoltaic multilayers

Materials Research Society Symposium Proceedings

Volumn 1323, Issue , 2012, Pages 157-162

  Fried, M ^a   Juhasz, G ^a   Major, C ^a   Nemeth, A ^b   Petrik, P ^a   Polgar, O ^a   Salupo, C ^b   Dahal, Lila R ^b   Collins, R W ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF TOLEDO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BROADBAND SOURCES; COMMERCIAL INSTRUMENTS; DATA POINTS; DETECTION SYSTEM; EX SITU; HIGH-RESOLUTION SPECTRA; HIGH-SPEED; HYDROGENATED AMORPHOUS SILICON (A-SI:H); IMAGING ELLIPSOMETRY; IN-SITU MEASUREMENT; LINE IMAGES; MEASUREMENT TECHNIQUES; ONE DIMENSION; OPTICAL GEOMETRY; PHOTOVOLTAICS; POLYMER SUBSTRATE; ROLL TO ROLL; ROTATION PERIOD; SAMPLE SURFACE; SCALING-UP; SOURCE SYSTEMS; SPATIAL RESOLUTION; SPECTROSCOPIC ELLIPSOMETERS; TWO-DIMENSION; TWO-DIMENSIONAL ARRAYS; WAVELENGTH DISPERSION; ZNO;

AMORPHOUS SILICON; ELLIPSOMETRY; IMAGE RESOLUTION; MANUFACTURING DATA PROCESSING; OPTICAL INSTRUMENTS; PHOTOMAPPING; PHOTOVOLTAIC EFFECTS; PINHOLE CAMERAS; SOLAR POWER GENERATION; ZINC OXIDE;

MULTILAYERS;

EID: 84455183676     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2011.820     Document Type: Conference Paper

References (5)

1. Patent pending, P0700366, PCT/HU2008/000058
2. G. Juhasz, Z. Horvath, C. Major, P. Petrik, O. Polgar, and M. Fried, "Non-collimated beam ellipsometry", Phys. Stat. Sol. (c) 5, 1081-1084 (2008).
3. C. Major, G. Juhasz, Z. Horvath, O. Polgar, and M. Fried, "Wide angle beam ellipsometry for extremely large samples", Phys. Stat. Sol. (c), 5, 1077-1080 (2008).
4. C. Major, G. Juhasz, P. Petrik, Z. Horvath, O. Polgar, and M. Fried, "Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production", Vacuum 84, 119-122 (2009).
5. M. Fried, G. Juhasz, C. Major, P. Petrik, O. Polgar, Z. Horvath, A. Nutsch, "Expanded beam (macro-imaging) ellipsometry", Thin Solid Films 519, 2730-2736 (2011).