Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production

Vacuum

Volumn 84, Issue 1, 2009, Pages 119-122

  Major, C ^a   Juhasz G ^a   Petrik, P ^a   Horvath Z ^b   Polgar O ^a   Fried, M ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

Spectroscopic ellipsometry; Transparent conductive oxide (TCO); Wide angle beam ellipsometry

Indexed keywords

AL-DOPED ZNO; ANGLE-OF-INCIDENCE; ELLIPSOMETERS; FILM POLARIZER; IN-SITU; LONG LINE; MULTIWAVELENGTH; OPTICAL GRATING; SOLAR CELL FABRICATION; SPECIFIC RESISTANCES; SPECTRAL MEASUREMENT; SPECTROSCOPIC ELLIPSOMETRY MEASUREMENTS; TRANSPARENT CONDUCTIVE OXIDE (TCO); WIDE ANGLE; WIDE ANGLE BEAM ELLIPSOMETRY; XENON LAMPS;

CELL MEMBRANES; ELECTRIC LAMPS; LIGHT; LIGHT TRANSMISSION; PHOTOVOLTAIC CELLS; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; SOLAR CELLS; SPECTROSCOPIC ELLIPSOMETRY; TOTAL QUALITY MANAGEMENT; XENON; ZINC OXIDE;

QUALITY CONTROL;

EID: 69249229519     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.05.013     Document Type: Article

References (5)

1. Patent pending, P104255-1389; 2008.
2. Fried M, Horváth Z, Juhász G, Mosoni T, Petrik P. Divergent illumination optical testing device. In: Proc.of 13th advanced equipment control/advanced process control conference, 6-11, October, 2002, Banff, Canada, poster.
3. Juhasz G., Horvath Z., Major C., and Fried M. Phys Stat Sol (c) (2008) 1081
4. Major C., Juhasz G., Horvath Z., Polgar O., and Fried M. Phys Stat Sol (c) (2008) 1077
5. Nemeth A., Major C., Fried M., Labadi Z., and Barsony I. Thin Solid Films (2008) 7016