Fabrication of vertically aligned diamond whiskers from highly boron-doped diamond by oxygen plasma etching

ACS Applied Materials and Interfaces

Volumn 3, Issue 2, 2011, Pages 177-182

  Terashima, Chiaki ^a   Arihara, Kazuki ^b   Okazaki, Sohei ^b   Shichi, Tetsuya ^b   Tryk, Donald A ^c   Shirafuji, Tatsuru ^a   Saito, Nagahiro ^a   Takai, Osamu ^a   Fujishima, Akira ^b,d  

^a NAGOYA UNIVERSITY   (Japan)

^b CENTRAL JAPAN RAILWAY COMPANY   (Japan)

^c UNIVERSITY OF YAMANASHI   (Japan)

^d TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Boron doped diamond; Nanograss array; Nanostructure; Oxygen plasma; Reactive ion etching; Whisker

Indexed keywords

BORON DOPED DIAMOND; NANOGRASS; OXYGEN PLASMA; REACTIVE ION; WHISKER;

BORON; CONDUCTIVE MATERIALS; DOPING (ADDITIVES); OXYGEN; PLASMA ETCHING; PLASMAS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

DIAMONDS;

EID: 83455204693     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am1007722     Document Type: Article

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