Nanotribological and nanomechanical properties of plasma-polymerized polyterpenol thin films

Journal of Materials Research

Volumn 26, Issue 23, 2011, Pages 2952-2961

  Bazaka, Kateryna ^a   Jacob, Mohan V ^a  

^a JAMES COOK UNIVERSITY   (Australia)

Author keywords

Nanoindentation; Plasma enhanced CVD; Thin film

Indexed keywords

DEPOSITION CONDITIONS; DEPOSITION POWER; ELASTIC RECOVERY; MECHANICAL DEFORMATION; NANO-SCRATCH; NANOMECHANICAL PROPERTY; PLASMA POLYMERS; PLASMA-ENHANCED CVD; RF POWER; ROOT MEAN SQUARE; SURFACE ROUGHNESS PARAMETERS;

ADHESION; CHEMICAL VAPOR DEPOSITION; COATINGS; DEPOSITION; NANOINDENTATION; ORGANIC POLYMERS; PLASMAS; SURFACE ROUGHNESS; THIN FILMS; WEAR RESISTANCE;

PLASMA DEPOSITION;

EID: 82955239842     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/jmr.2011.349     Document Type: Article

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