Effect of helium implantation on the properties of plasma polymer films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 704-707

  Rangel, Elidiane C ^a   Cruz, N C ^a   Lepienski, C M ^a  

^a SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

Author keywords

Hardness; Ion implantation; Optical and electrical properties; Plasma polymers

Indexed keywords

ACETYLENE; CHEMICAL BONDS; CHEMICAL MODIFICATION; COMPOSITION; CROSSLINKING; ELECTRIC CONDUCTIVITY; HARDNESS; HELIUM; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MOLECULAR STRUCTURE; PLASMAS; PLASTIC FILMS; ULTRAVIOLET SPECTROSCOPY;

PLASMA POLYMER FILMS;

ION IMPLANTATION;

EID: 0036573838     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00637-7     Document Type: Conference Paper

References (9)