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Volumn 15, Issue 1, 2012, Pages

Fabrication of delamination free, low stress diamond like carbon (dlc) films using pulsed laser deposition (PLD)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FAILURES; DLC FILM; GRAPHITE TARGET; LOW STRESS; MULTI-CYCLE; POOR ADHESION; SINGLE CYCLE;

EID: 82955223342     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/2.010201esl     Document Type: Article
Times cited : (4)

References (14)
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  • 5
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  • 10
    • 0035270811 scopus 로고    scopus 로고
    • Thick, well-adhered, highly stressed tetrahedral amorphous carbon
    • DOI 10.1016/S0925-9635(00)00530-6, PII S0925963500005306
    • M. Chhowalla, Diamond and Rel. Mater., 10, 1011 (2001). 10.1016/S0925-9635(00)00530-6 (Pubitemid 32477637)
    • (2001) Diamond and Related Materials , vol.10 , Issue.3-7 , pp. 1011-1016
    • Chhowalla, M.1
  • 11
    • 0031171986 scopus 로고    scopus 로고
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    • DOI 10.1016/S0257-8972(97)00007-8
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  • 12
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    • 3 bonding in diamond-like carbon?
    • DOI 10.1016/S0925-9635(01)00705-1, PII S0925963501007051, Proceedings of Diamond 2001, the 12th Conference on Diamond, Diamond-like materials, Carbon Nanotubes, Nitrides and Silicon Carbide
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    • (2002) Diamond and Related Materials , vol.11 , Issue.3-6 , pp. 994-999
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  • 14
    • 0031700475 scopus 로고    scopus 로고
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.