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Volumn 398-399, Issue , 2001, Pages 163-169
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Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon: Processes and properties
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Author keywords
Amorphous carbon; Diamond like carbon (DLC); Hard coatings; Plasma enhanced carbon vapor deposition (PECVD)
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Indexed keywords
EMISSION SPECTROSCOPY;
FILM GROWTH;
GROUNDING ELECTRODES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
STOICHIOMETRY;
THIN FILMS;
OPTICAL EMISSION SPECTROSCOPY (OES);
DIAMOND LIKE CARBON FILMS;
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EID: 0035506418
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)01425-0 Document Type: Article |
Times cited : (23)
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References (17)
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