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Volumn 398-399, Issue , 2001, Pages 163-169

Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon: Processes and properties

Author keywords

Amorphous carbon; Diamond like carbon (DLC); Hard coatings; Plasma enhanced carbon vapor deposition (PECVD)

Indexed keywords

EMISSION SPECTROSCOPY; FILM GROWTH; GROUNDING ELECTRODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STOICHIOMETRY; THIN FILMS;

EID: 0035506418     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01425-0     Document Type: Article
Times cited : (23)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.