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Volumn 18, Issue 11, 2011, Pages

1-D fluid model of atmospheric-pressure rf HeO2 cold plasmas: Parametric study and critical evaluation

Author keywords

[No Author keywords available]

Indexed keywords

B-Y IONS; COLD PLASMAS; COLLISIONALITY; CRITICAL EVALUATION; DIFFUSION LIMITED; ELECTRODE LOSS; ELECTRON INDUCED REACTIONS; FLUID MODELS; GAS PHASE PROCESS; INPUT POWER; KEY REACTIONS; METASTABLES; NEUTRAL SPECIES; PARAMETRIC STUDY; REACTIVE OXYGEN SPECIES; SURFACE ADSORPTION;

EID: 82555173581     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3655441     Document Type: Conference Paper
Times cited : (64)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.