Development of network database system for thermophysical property data of thin films

Japanese Journal of Applied Physics

Volumn 50, Issue 11 PART 2, 2011, Pages

  Yamashita, Yuichiro ^a,b   Yagi, Takashi ^a,b   Baba, Tetsuya ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPREHENSIVE INFORMATION; DATA ITEMS; FUSED SILICA SUBSTRATES; MATERIAL CLASSIFICATION; MATERIAL INFORMATION; MULTI-LAYERED FILMS; NATIONAL METROLOGY INSTITUTE OF JAPANS; NETWORK DATABASE; QUARTZ SUBSTRATE; SIGNAL DATA; SINGLE LAYER; THERMO-PHYSICAL PROPERTY; THREE-LAYER;

DATABASE SYSTEMS; FILM PREPARATION; FUSED SILICA; QUARTZ; THERMODYNAMIC PROPERTIES; THIN FILMS; TITANIUM NITRIDE; ULTRAFAST LASERS; USER INTERFACES;

INTERFACES (MATERIALS);

EID: 82455175707     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.11RH03     Document Type: Conference Paper

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