Effect of synthesis condition on thermal diffusivity of molybdenum thin films observed by a picosecond light pulse thermoreflectance method

Japanese Journal of Applied Physics

Volumn 48, Issue 5 PART 3, 2009, Pages

  Taketoshi, Naoyuki ^a   Yagi, Takashi ^a   Baba, Tetsuya ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL CONDUCTIVITY MEASUREMENTS; GRAIN SIZE; HEAT TRANSFER MECHANISM; IN-PLANE; IN-PLANE RESISTIVITY; MEAN FREE PATH; OUT-OF-PLANE; PICOSECOND LIGHT PULSE; PYREX 7740 GLASS; SCATTERING OBJECTS; SYNTHESIS CONDITIONS; TEM; TEM IMAGES; THERMOREFLECTANCE; XRD PEAKS;

ELECTRIC CONDUCTIVITY; FILM THICKNESS; GLASS; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; LIGHT; LIGHT TRANSMISSION; MOLYBDENUM; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL DIFFUSION; THERMODYNAMIC PROPERTIES; THIN FILM DEVICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

THERMAL DIFFUSIVITY;

EID: 70249129767     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.05EC01     Document Type: Article

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