X-ray photoelectron spectroscopy and thermal desorption spectroscopy comparative studies of L-CVD SnO2 ultra thin films

Thin Solid Films

Volumn 520, Issue 3, 2011, Pages 913-917

  Kwoka, M ^a,b   Waczynska N ^a   Koscielniak P ^a   Sitarz, M ^a   Szuber, J ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

Depth profiling (DP); L CVD ultrathin films; Surface chemistry; Thermal desorption spectroscopy (TDS); Tin dioxide; X ray protoelectron spectroscopy (XPS)

Indexed keywords

AIR EXPOSURE; ATOMIC OXYGEN; COMPARATIVE STUDIES; GOOD CORRELATIONS; IN-SITU HYDROGENATION; MOLECULAR HYDROGEN; NON-STOICHIOMETRY; NONSTOICHIOMETRIC; RELATIVE CONCENTRATION; SI (100) SUBSTRATE; ULTRA-THIN; X RAY PHOTOEMISSION SPECTROSCOPY; X-RAY PROTOELECTRON SPECTROSCOPY (XPS);

CARBON DIOXIDE; CHEMICAL STABILITY; CHEMICAL VAPOR DEPOSITION; DEPTH PROFILING; HYDROGEN; HYDROGENATION; MOLECULAR OXYGEN; MONOLAYERS; PHOTOELECTRON SPECTROSCOPY; SURFACE CHEMISTRY; THERMAL DESORPTION; THERMAL DESORPTION SPECTROSCOPY; TIN; TIN DIOXIDE; ULTRATHIN FILMS; WATER VAPOR;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 81855222093     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.185     Document Type: Conference Paper

References (29)

1. S. Park, H. Zheng, and J.D. Mackenzie Mater. Lett. 22 1995 175
2. R. Chandrasekhar, and K.L. Choy J. Cryst. Growth 231 2001 215
3. S. Ferrere, A. Zaban, and B.A. Gregg J. Phys. Chem. 101 1997 4490
4. W. Göpel, and K.-D. Schierbaum Sens. Actuators B26-27 1995 1
5. N. Barsan, M. Schweitzer-Barberich, and W. Göpel Fresenius J. Anal. Chem. 365 1999 287
6. M. Batzil, and U. Dieboldt Progr. Surf. Sci. 79 2005 47
7. D.W. Lane, J.A. Coath, and H.S. Beldon Thin Solid Films 221 1992 262
8. J.W. Gardner, H.V. Shurner, and P. Corcoran Sens. Actuators B 4 1991 117
9. G. Sberveglieri, G. Faglia, S. Groppelli, P. Nelli, and A. Camanzi Semicond. Sci. Technol. 5 1990 1231
10. R. Rella, A. Serra, P. Siciliano, L. Vasanelli, G. De, and A. Licciulli Thin Solid Films 304 1997 339
11. J. Vetrone, and Y. Chung J. Vac. Sci. Technol. A9 1991 3041
12. I.S. Mulla, V.J. Rao, H.S. Soni, S. Badrinarayanan, and A.P.B. Sinha Surf. Coat. Technol. 31 1987 77
13. F. Gu, S.F. Wang, M.K. Lu, X.F. Cheng, S.W. Liu, G.J. Zhou, D. Xu, and D.R. Yuan J. Cryst. Growth 262 2004 182
14. G. Korotchenkov, V. Macsanov, V. Brinzari, V. Tolstoy, J. Chwank, A. Cornet, and J. Morante Thin Solid Films 467 2004 467
15. N. Yamazoe Sens. Actuators B5 1991 7
16. R. Larciprete, E. Borsella, P. De Padova, M. Mangiantini, and P. Perfetti J. Vac. Sci. Technol. A11 1993 59
17. R. Larciprete, E. Borsella, P. De Padova, P. Perfetti, and C. Croti J. Vac. Sci. Technol. A15 1997 2492
18. R. Larciprete, E. Borsella, P. De Padova, P. Perfetti, G. Faglia, and G. Sberveglieri Thin Solid Films 323 1998 291
19. J. Szuber, G. Czempik, R. Larciprete, and B. Adamowicz Sens. Actuators B 70 2000 177
20. J. Szuber, G. Czempik, R. Larciprete, D. Koziej, and B. Adamowicz Thin Solid Films 391 2001 198
21. M. Kwoka, L. Ottaviano, M. Passacantando, S. Santucci, and J. Szuber Appl. Surf. Sci. 252 2006 7730
22. M. Kwoka, L. Ottaviano, M. Passacantando, G. Czempik, S. Santucci, and J. Szuber Appl. Surf. Sci. 254 2008 8089
23. M. Kwoka, L. Ottaviano, N. Waczynska, S. Santucci, and J. Szuber Appl. Surf. Sci. 516 2010 5771
24. M. Kwoka, L. Ottaviano, and J. Szuber Thin Solid Films 515 2007 8328
25. M. Kwoka, L. Ottaviano, M. Passacantando, S. Santucci, G. Czempik, and J. Szuber Thin Solid Films 490 2005 36
26. M. Kwoka, G. Czempik, and J. Szuber Acta Phys. Slovaka 55 2005 391
27. M. Kwoka, Studies o surface properties of L-CVD SnO2 thin films, Ph.D. Thesis, Silesian University of Technology, Gliwice, Poland, 2007 (in English).
28. R.W.M. Kwok, XPS Peak Fitting Program for WIN95/98 XPSPEAK Version 4.1, Department of Chemistry, The Chinese University of Hong Kong, 1999.
29. C.D. Wagner, W.M. Riggs, L.E. Davis, J.F. Moulder, and G.E. Mnilenberger Handbook of X-ray Photoelectron Spectroscopy 1979 Perkin-Elmer Eden Prairie, MN