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Volumn 252, Issue 21, 2006, Pages 7730-7733
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XPS depth profiling studies of L-CVD SnO 2 thin films
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Author keywords
Depth profiling; Thin films; Tin dioxide; XPS
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
INTERFACES (MATERIALS);
SUBSTRATES;
TIN COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ATOMIC CONCENTRATION;
DEPTH PROFILING;
TIN DIOXIDE;
THIN FILMS;
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EID: 33747182831
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2006.03.065 Document Type: Article |
Times cited : (50)
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References (14)
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