Surface analysis study of the oxidation of organotin films deposited by ArF excimer laser chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2492-2501

  Larciprete, R ^a   Borsella, E ^a   De Padova, P ^b   Perfetti, P ^b   Crotti, C ^c  

^a ENEA   (Italy)

^b CNR   (Italy)

^c Sezione Trieste   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031533959     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580916     Document Type: Article

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