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Volumn 34, Issue 1, 2011, Pages 79-84

Spectroscopic ellipsometry analyses of thin films in different environments: An innovative "reverse side" approach allowing multi angle measurements

(4) Della Gaspera, Enrico a Schutzmann, Stefano b Guglielmi, Massimo a Martucci, Alessandro a

a UNIVERSITY OF PADOVA (Italy)

b LOT Oriel Italia Srl (Italy)

Author keywords

Ellipsometry; Porosity; Thin films

Indexed keywords

CELLS; CYLINDERS (SHAPES); CYTOLOGY; ELLIPSOMETRY; POROSITY; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY;

CORRELATION BETWEEN PARAMETERS; CYLINDRICAL GEOMETRY; EFFECTIVE MEDIUM APPROXIMATION MODELS; ELLIPSOMETERS; ELLIPSOMETRY MEASUREMENTS; FITTING ERROR; REFRACTIVE INDEX DISPERSION; SAMPLE HOLDERS;

THIN FILMS;

EID: 81155159758 PISSN: 09253467 EISSN: None Source Type: Journal
DOI: 10.1016/j.optmat.2011.07.014 Document Type: Article

Times cited : (6)

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