Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation

Proceedings of the ASME Design Engineering Technical Conference

Volumn 3, Issue PARTS A AND B, 2008, Pages 505-513

  Pfeffer, Markus ^a   Oechsner, Richard ^a   Pfitzner, Lothar ^a   Ryssel, Heiner ^a   Ocker, Berthold ^b   Verdonck, Patrick ^c  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b Singulus Nano Deposition Technologies GmbH   (Germany)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED TRANSPORTATION SYSTEMS; BATCH SIZES; CAPITAL INVESTMENT; COMPLEX PRODUCTION; CYCLE TIME; DEPOSITION EQUIPMENT; EQUIPMENT PERFORMANCE; EQUIPMENT SUPPLIERS; GLOBAL CAPACITY; GLOBAL MARKET; OPTIMIZATION STRATEGY; OXIDATION PROCESS; PERFORMANCE OPTIMIZATIONS; PROCESSING STEPS; PRODUCT VARIETY; SEMICONDUCTOR MANUFACTURERS; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR WAFER FABRICATION; SIMULATION MODEL; WAFER-FABS;

DESIGN; DISCRETE EVENT SIMULATION; INDUSTRIAL APPLICATIONS; INTERNATIONAL TRADE; INVESTMENTS; LOGISTICS; MANUFACTURE; OPTIMIZATION; PHOTOLITHOGRAPHY; SILICON WAFERS; WAFER BONDING;

EQUIPMENT;

EID: 81155138125     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2008-49274     Document Type: Conference Paper

References (11)

1. Law, A.M. & Kelton, W.D. "Simulation modeling and analysis", Singapore, McGraw-Hill Book Company, 1991
2. nd ed., Boston, McGraw-Hill, 2000
3. G. E. Moore, Electronics, 28(8), 114 (1965)
4. Ward, Ed et al., "Accelerated Time to Market for Future 300-mm Fabs", Solid State Technology, November 1997, pp. 99
5. Fowler, J., Mönch, L., Rose, O., "Scheduling and Simulation", J. Herrmann (Ed.): Handbook of Production Scheduling, Springer 2006
6. Fowler, J.W., Hogg., G.L., Mason, S.J., "Workload Control in the Semiconductor Industry", Production Planning and Control Special Issue on Workload Control, Vol. 13, No. 7, pp. 568-578, 2002
7. Mackulak, G.T., Savory, P.A., "A Simulation Based Experiment for Comparing AMHS Performance in a Semiconductor Fabrication Facility", IEEE Transactions on Semiconductor Manufacturing, Vol. 14, No. 3, August 2001, pp. 273-280
8. Phojanamongkolkij, N., Fowler, J.W., and Cochran, J.K., "Determining 'Optimal' Policies for Batch-Processing Machines of a Wafer Fabrication Facility", Journal of Manufacturing Systems, Vol. 21, No. 5, pp. 363-379, 2002
9. Kelton, W.D., Sadowski, R.P., Sadowski, D.A., "Simulation with ARENA", 4th ed., Boston, McGraw- Hill, 2007.
10. Schneider, C., Pfitzner, L., Ryssel H., "Integrated metrology - An enabler for advanced process control", Proc. SPIE, 4406, 118 (2001)
11. Project Website SEA-NET: www.sea-net.info