Determining operating criterion of batch processing operations for wafer fabrication

Journal of Manufacturing Systems

Volumn 21, Issue 5, 2002, Pages 363-379

  Phojanamongkolkij, Nipa ^a   Fowler, John W ^b   Cochran, Jeffery K ^b  

^a NORTHERN ILLINOIS UNIVERSITY   (United States)

^b AZ 85281   (United States)

Author keywords

Batch processing; Batch processing policy; Queuing; Semiconductor manufacturing; Simulation

Indexed keywords

EID: 0042871637     PISSN: 02786125     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0278-6125(02)80035-8     Document Type: Article

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