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Volumn 40, Issue 11, 1997, Pages 99-106
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Accelerated time to market for future 300-mm fabs
a
SEMI
(United States)
f
IBM
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 5844425601
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (2)
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References (5)
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