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Volumn 99, Issue 17, 2011, Pages

Facile fabrication of lateral nanowire wrap-gate devices with improved performance

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER HEIGHTS; CHEMICAL ETCHING; E-BEAM LITHOGRAPHY; FABRICATION TECHNIQUE; FACILE FABRICATION; FIELD-EFFECT MOBILITIES; HIGH-CAPACITIVE; PROCESS USE; SUBTHRESHOLD SLOPE; TEMPERATURE RANGE;

EID: 80555139906     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3634010     Document Type: Article
Times cited : (21)

References (21)
  • 10
    • 84855814477 scopus 로고    scopus 로고
    • Realizing Lateral Wrap-Gated Nanowire FETs: Controlling Gate Length with Chemistry Rather than Lithography, (in press). 10.1021/nl104403g
    • K. Storm, G. Nylund, L. Samuelson, and A. P. Micolich, Realizing Lateral Wrap-Gated Nanowire FETs: Controlling Gate Length with Chemistry Rather than Lithography, Nano Lett. (in press). 10.1021/nl104403g
    • Nano Lett.
    • Storm, K.1    Nylund, G.2    Samuelson, L.3    Micolich, A.P.4
  • 12
    • 80555142178 scopus 로고    scopus 로고
    • See supplementary material at E-APPLAB-99-042136 for resist details, ALD process, device images, capacitance measurement, and calculation of the dG dV g only for the wrap-gated part.
    • See supplementary material at http://dx.doi.org/10.1063/1.3634010 E-APPLAB-99-042136 for resist details, ALD process, device images, capacitance measurement, and calculation of the dG dV g only for the wrap-gated part.
  • 13
    • 33947530366 scopus 로고    scopus 로고
    • Sulfur passivation for ohmic contact formation to InAs nanowires
    • DOI 10.1088/0957-4484/18/10/105307, PII S0957448407383360
    • D. B. Suyatin, C. Thelander, M. T. Bjrk, I. Maximov, and L. Samuelson, Nanotechnology 18, 105307 (2007). 10.1088/0957-4484/18/10/105307 (Pubitemid 46472252)
    • (2007) Nanotechnology , vol.18 , Issue.10 , pp. 105307
    • Suyatin, D.B.1    Thelander, C.2    Bjork, M.T.3    Maximov, I.4    Samuelson, L.5
  • 21
    • 49149124762 scopus 로고    scopus 로고
    • 10.1103/PhysRevB.78.035338
    • J. J. Krich and B. I. Halperin, Phys. Rev. B 78, 035338 (2008). 10.1103/PhysRevB.78.035338
    • (2008) Phys. Rev. B , vol.78 , pp. 035338
    • Krich, J.J.1    Halperin, B.I.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.