Development of individually-addressable parylene microtube arrays

Journal of Micromechanics and Microengineering

Volumn 21, Issue 11, 2011, Pages

  Li, Yuefa ^a   Tu, Hongen ^a   Iezzi, Raymond ^a   Finlayson, Paul ^a   Xu, Yong ^a  

^a WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANIMAL STUDIES; HORIZONTAL TRENCH; IN-PLANE; IN-VIVO; INDIVIDUAL ADDRESSING; MICRO-TUBES; MICROTUBE ARRAYS; MICROTUBES AND MICROCHANNELS; OUT-OF-PLANE; PARYLENE CABLE; PARYLENES; RETINAL PROSTHESIS; TEMPORAL AND SPATIAL PATTERN; THROUGH SILICON VIAS;

INTEGRATION; OPHTHALMOLOGY; PROSTHETICS; REACTIVE ION ETCHING;

MICROCHANNELS;

EID: 80555138826     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/11/115005     Document Type: Article

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