Porous WO 3 from anodized sputtered tungsten thin films for NO 2 detection

Applied Surface Science

Volumn 258, Issue 3, 2011, Pages 1062-1068

  Hu, Ming ^a   Zeng, Jing ^a   Wang, Weidan ^a   Chen, Huiqing ^a   Qin, Yuxiang ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Anodization; Magnetron sputtering; Porous tungsten oxide

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ANODIC OXIDATION; MAGNETRON SPUTTERING; NITROGEN OXIDES; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

ALUMINA SUBSTRATES; ANODIZATIONS; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; HIGH SPECIFIC SURFACE AREA; LOW OPERATING TEMPERATURE; POROUS TUNGSTEN; STRUCTURAL AND MORPHOLOGICAL PROPERTIES; TUNGSTEN THIN FILMS;

TUNGSTEN COMPOUNDS;

EID: 80455160311     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.09.002     Document Type: Article

References (29)

1. 2 gas sensor Thin Solid Films 418 2002 9 15 (Pubitemid 35214076)
2. 3 varistor-type gas sensor Sens. Actuators B: Chem. 150 2010 588 593
3. 3 thin film Sens. Actuators B: Chem. 96 2003 219 225
4. 2 concentrations Sens. Actuators B: Chem. 77 2001 62 66
5. 2 sensors fabricated through low frequency AC electrophoretic deposition Sens. Actuators B: Chem. 146 2010 165 170
6. 3 thin film gas sensors derived from particulate sol-gel route Acta Mater. 55 2007 4455 4466 (Pubitemid 46977814)
7. 3 -loaded vanadium oxide nanotubes gas sensor Appl. Surf. Sci. 257 2011 7071 7075
8. 3 films prepared by two-step annealing Appl. Surf. Sci. 244 2005 453 457 (Pubitemid 40423752)
9. H. Kawasaki, J. Namba, K. Iwatsuji, Y. Suda, K. Wada, K. Ebihara, and T. Ohshima NOx gas sensing properties of tungsten oxide thin films synthesized by pulsed laser deposition method Appl. Surf. Sci. 197 2002 547 551 (Pubitemid 35344623)
10. 2 sensor Appl. Surf. Sci. 256 2009 1050 1053
11. 3 gas sensor Sens. Actuators B: Chem. 106 2005 713 718
12. 2 thick film at high operating temperature Curr. Appl. Phys. 9 2009 E235 E238
13. 2 gas sensor operating at low temperature Sens. Actuators B: Chem. 123 2007 1090 1095 (Pubitemid 46678805)
14. 2 : a novel semiconductor-oxide gas sensor Mater. Lett. 34 1998 99 102 (Pubitemid 128387273)
15. 2 gas sensing characteristics Appl. Surf. Sci. 257 2011 4715 4718
16. C.M. Ghimbeu, J. Schoonman, M. Lumbreras, and M. Siadat Electrostatic spray deposited zinc oxide films for gas sensor applications Appl. Surf. Sci. 253 2007 7483 7489 (Pubitemid 46873781)
17. 2 detection Appl. Surf. Sci. 256 2010 5905 5910
18. J. Kukkola, J. Maklin, N. Halonen, T. Kyllonen, G. Toth, M. Szabo, A. Shchukarev, J.P. Mikkola, H. Jantunen, and K. Kordas Gas sensors based on anodic tungsten oxide Sens. Actuators B: Chem. 153 2011 293 300
19. 3 thin films deposited on porous silicon J. Nanosci. Nanotechnol. 10 2010 7739 7742
20. 3 formed in NaF electrolytes Electrochem. Commun. 7 2005 295 298 (Pubitemid 40228863)
21. 3 films formed by anodic oxidation of DC-sputtered tungsten layers Electrochim. Acta 55 2010 6953 6958
22. 3 from anodized RF sputtered tungsten thin films Electrochem. Commun. 11 2009 768 771
23. 2 -sensing properties of tungsten oxide nanostructures Sens. Actuators B: Chem. 150 2010 339 345
24. 2 -sensing properties of tungsten oxide nanowires synthesized by solvothermal method Sens. Actuators B: Chem. 155 2011 646 652
25. 3 semiconductor material Solid State Electron. 45 2001 639 644
26. 3 thin film as ozone sensor Sens. Actuators B: Chem. 119 2006 327 334 (Pubitemid 44332056)
27. G. Korotcenkov The role of morphology and crystallographic structure of metal oxides in response of conductometric-type gas sensors Mater. Sci. Eng. R. 61 2008 1 39 (Pubitemid 351608553)
28. A. Rothschild, and Y. Komem The effect of grain size on the sensitivity of nanocrystalline metal-oxide gas sensors J. Appl. Phys. 95 2004 6374 6380
29. 2 -based elements Sens. Actuators B: Chem. 3 1991 147 155 (Pubitemid 21729520)