Gas sensing properties of WO3 doped rutile TiO2 thick film at high operating temperature

Current Applied Physics

Volumn 9, Issue 4 SUPPL., 2009, Pages

  Jo, Sung Eun ^a   Kang, Byeong Geun ^a   Heo, Sungmoo ^a   Song, Soonho ^a   Kim, Yong Jun ^a  

^a Yonsei University   (South Korea)

Author keywords

Grain growth; High temperature gas sensor; High temperature heat treatment; WO3 doped rutile TiO2

Indexed keywords

DOPED-TIO; FABRICATED SENSORS; GAS SELECTIVITY; GAS SENSING PROPERTIES; HIGH OPERATING TEMPERATURE; HIGH TEMPERATURE GAS SENSORS; HIGH TEMPERATURE HEAT TREATMENT; MORPHOLOGICAL PROPERTIES; OXIDIZING GAS; RUTILE PHASE; RUTILE TIO; SEM; SEMICONDUCTOR GAS SENSORS; SENSING FILMS; TIO; WO3 DOPED RUTILE TIO2;

ATOMIC FORCE MICROSCOPY; FABRICATION; GAS DETECTORS; GASES; GRAIN GROWTH; GRAIN SIZE AND SHAPE; HEAT TREATMENT; OXIDE MINERALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR GROWTH; SURFACE TOPOGRAPHY; TEMPERATURE; THERMAL EFFECTS; THICK FILMS; TITANIUM OXIDES; TOPOGRAPHY; X RAY DIFFRACTION;

SENSORS;

EID: 71849119784     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2009.06.053     Document Type: Article

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