Dynamically adjustable three-dimensional gray masks operated by electrostatic force modulation for the fabrication of microlens arrays in microchannels

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 4, 2010, Pages

  Huang, Shih Hao ^a   Yu, Zheng Yu ^a   Lin, Chia Kai ^a   Hung, Kuo Yung ^b  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Gray scale mask; Microlens array; Photopolymerization

Indexed keywords

CONVEYORS; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; LIQUIDS; MICROCHANNELS; MICROFLUIDICS; MICROOPTICS; OLIGOMERS; OPTICAL INSTRUMENT LENSES; PHOTOPOLYMERIZATION;

ACRYLATE OLIGOMERS; GRAY MASK; GRAY SCALE; GRAY-SCALE MASK; HIGH VOLTAGE; HIGH-THROUGHPUT; MICRO-LENS; MICRO-LENS ARRAYS; MICRO-OPTICAL COMPONENTS; MICRO-OPTICAL ELEMENTS; PDMS MICROCHANNELS; SURFACE PROFILES;

MICROLENSES;

EID: 80455129597     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3497586     Document Type: Article

References (28)

1. D. H. Raguin, G. Gretton, D. Mauer, E. Piscani, E. Prince, T. R. M. Sales, and D. Schertler, "Anamorphic and aspheric microlenses and microlens arrays for telecommunication applications," in Proc. Optical Fiber Communication Conf. and Exhibit, Vol. 1, pp. MK1-1-MK1-3, IEEE, Piscataway, NJ (2001).
2. N. F. Borrelli, "Efficiency of microlens arrays for projection LCD," in Proc. Electron. Compon. Technol. Conf., pp. 338-345 (1994).
3. Y. Chiu, H. F Shih, J. C. Chiou, S. T. Cheng, K. Y. Hung, F. G. Tseng, and W. Fang, "Design and fabrication of a small-form-factor optical pickup head," IEEE Trans. Magnet. 45, 2194-2197 (2009).
4. S.Kwon and L. P. Lee, "Micromachined transmissive scanning confocal microscope," Opt. Lett. 29, 706-708 (2004).
5. K. Y. Hung, F. G. Tseng, and H. S. Khoo, "Integrated three-dimensional optical mems for chip-based fluorescence detection," J. Micromech. Microeng. 19, 045014 (2009).
6. K. Y. Hung, F. G. Tseng, and H. P. Chou, "Application of 3D gray mask for the fabrication of curved SU-8 structures," J. MicroSyst. Technol. 11, 365-369 (2005).
7. C. P. Lin, H. Yang, and C. K. Chao, "A new microlens array fabrication method using UV proximity printing," J. Micromech. Microeng. 13, 748-757 (2003).
8. J. C. Galas, B. Belier, A. Aassime, J. Palomo, D. Bouville, and J. Aubert, "Fabrication of three-dimensionalmicrostructures using standard ultraviolet and electron-beam lithography," J. Vac. Sci. Technol. B 22, 1160-1162 (2004).
9. K. Totsu and M. Esashi, "Gray-scale photolithography using maskless exposure system," J. Vac. Sci. Technol. B 23, 1487-1490 (2005). (Pubitemid 43127233)
10. R. Danzebrink andM. A. Aegerter, "Deposition of optical micro arrays by ink-jet processes," Thin Solid Film 392, 223-225 (2001). (Pubitemid 32618190)
11. B. K. Lee, D. S. Kim, and T. H. Kwon, "Replication of microlens arrays by injection molding," Microsyst. Technol. 10, 531-535 (2004).
12. K. Y. Hung, Y. K. Chen, S. H. Huang, and D. C. Shye, "Molding and hot forming techniques for fabricating plastic aspheric lenses with high blue-light transmittance," Microsys. Technol. 16(8-9), 1439-1444 (2009).
13. C. Y. Chang, S. Y. Yang, and M. H. Chu, "Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process," Microelectron. Eng. 84, 355-361 (2007).
14. K. Y. Hung, F. G. Tseng, and T. H. Liao, "Electrostatic force modulated micro-aspherical lens for optical pickup head," J. Microelectromech. Syst. 17, 370-380 (2008).
15. Y. Lu and S. C. Chen, "Direct write of microlens array using digital projection photopolymerization," Appl. Phys. Lett. 92, 041109 (2008).
16. K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, "Fabrication of three-dimensional microstructure using maskless gray-scale lithography," Sens. Actuat. A Phys. 130, 387-392 (2006). (Pubitemid 44037327)
17. T. Hayashia, T. Shibata, T. Kawashima, E. Makino, T. Mineta, and T. Masuzawa, "Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist," Sens. Actuat. A Phys. 144, 381-388 (2008). (Pubitemid 351680142)
18. D. Dendukuri, D. C. Pregibon, J. Collins, T. A. Hatton, and P. S. Doyle, "Continuous flow lithography for high-throughput microparticle synthesis," Nature Mater. 5, 365-369 (2006).
19. D. Dendukuri, S. S. Gu, D. C. Pregibon, J. Collins, T. A. Hatton, and P. S. Doyle, "Stop flow lithography in a microfluidic device," Lab Chip 7, 818-828 (2007). (Pubitemid 47000818)
20. S. E. Chung, W. P. Park, H. Park, K. Yu, N. Park, and S. Kwon, "Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels," Appl. Phys. Lett. 91, 041106 (2007).
21. P. Panda, S. Ali, E. Lo, B. G. Chung, T. A. Hatton, A. Khademhosseini, and P. S. Doyle, "Stop-flow lithography to generate cell-laden microgel particles," Lab Chip 8, 1056-1061 (2008). (Pubitemid 351904833)
22. S. A. Lee, S. E. Chung, W. Park, S. H. Lee, and S. Kwon, "Threedimensional fabrication of heterogeneous microstructures using soft membrane deformation and optofluidic maskless lithography," Lab Chip 9, 1670-1675 (2009).
23. 2 inhibition in ultraviolet-and laser-induced polymerizations," Macromolecules 18, 1241-1244 (1985).
24. D. Dendukuri, P. Panda, R. Haghgooie, J. M. Kim, T. A. Hatton, and P. S. Doyle, "Modeling of oxygen-inhibited free radical photopolymerization in a PDMS microfluidic device," Macromolecules 41, 8547-8556 (2008).
25. The OSLO Software User Guide, Lambda Research Corporation, USA, (2009); http://www.lambdares.com.
26. W. J. Smith, Modern Optical Engineering, 4th ed., McGraw-Hill Professional, New York (2008).
27. J. Jang, D. Dendukuri, T. A. Hatton, E. L. Thomas, and P. S. Doyle, "A route to three-dimensional structures in a microfluidic device: stop flow interference lithography," Angew. Chem. Int. Ed. 46, 9027-9031 (2007). (Pubitemid 350232760)
28. S. Chapin, D. C. Pregibon, and P. S. Doyle, "High-throughput flow alignment of barcoded hydrogel microparticles," Lab Chip, 9, 3100-3109 (2009).