Integrated three-dimensional optical MEMS for chip-based fluorescence detection

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Hung, Kuo Yung ^a   Tseng, Fan Gang ^b,c   Khoo, Hwa Seng ^b  

^a MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c RESEARCH CENTER FOR APPLIED SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT ERROR; APD ARRAYS; ARRAY-TYPE; AVALANCHE PHOTO DIODE; CIRCULAR PATTERN; CMOS PROCESSS; DETECTION METHODS; EVANESCENT WAVE; EXCITATION LIGHT SOURCES; FLUORESCENCE DETECTION; FLUORESCENCE SENSING; FLUORESCENT DYES; FLUORESCENT SIGNALS; INCLINED MIRROR; INTRINSIC NATURE; LABELLED PROTEIN; LIGHT COLLECTION; LIGHT LOSS; LIGHT SIGNAL; LOW COSTS; LOW NOISE; MICRO-LENS; MONOLITHIC INTEGRATION; OPTICAL LENS; OPTICAL MEMS; POSITIONAL ERRORS; POST-CMOS INTEGRATION; PROTEIN CHIP; PROTEIN MICROARRAY; SCANNER SYSTEMS; SURFACE ABSORPTION; THREE-DIMENSIONAL (3D);

AVALANCHE DIODES; DC TRANSFORMERS; FLUORESCENCE; LABELS; LENSES; LIGHT; LIGHT SOURCES; LIGHT TRANSMISSION; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL INSTRUMENTS; RECONSTRUCTION (STRUCTURAL); SCANNING; STRUCTURAL DESIGN; THREE DIMENSIONAL;

SIGNAL DETECTION;

EID: 68849127986     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045014     Document Type: Article

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