High frequency dual-mode thermal-piezoresistive oscillators

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2011, Pages

  Rahafrooz, Amir ^a   Pourkamali, Siavash ^a  

^a University of Denver   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION FORCE; DUAL MODES; HIGH FREQUENCY; HIGHER FREQUENCIES; HIGHLY NONLINEAR; MECHANICAL STRAIN; MICROMECHANICAL STRUCTURES; OUTPUT FREQUENCY; PIEZORESISTIVE EFFECTS; POSITIVE FEEDBACK LOOP; RESONANT STRUCTURES; SELF-SUSTAINED OSCILLATIONS; SELF-SUSTAINED OSCILLATORS; SINGLE CRYSTALLINE SILICON;

AMPLIFIERS (ELECTRONIC); ELECTROMECHANICAL DEVICES;

FEEDBACK;

EID: 80155134015     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2011.5977864     Document Type: Conference Paper

References (8)

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3. C. Zuo, J. V. D. Spiegeland and G. Piazza, "1.05-GHz CMOS Oscillator Based on Lateral-Field-Excited Piezoelectric AlN Contour-Mode MEMS Resonators," IEEE Trans. on Ultrason., Ferroelectr., Freq. Control, vol. 57, no. 1, Jan 2010, pp. 82-87.
4. A. Rahafrooz, and S. Pourkamali, "High-frequency thermally actuated electromechanical resonators with piezoresistive readout," IEEE Trans. On Electron Device, 2011, Vol. 58, issue 4, pp. 1205-1214.
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6. A. A. Barlian, W.T. Park, J. R. Mallon, J., A. J. Rastegar, and B. L. Pruitt,''Fabrication Review: Semiconductor piezoresistance for microsystems," Proceedings of the IEEE, vol. 97, no. 3, Mar. 2009, pp. 513-552.
7. A. Samarao and F. Ayazi, "Temperature compensation of silicon micromechanical resonators via degenerate doping," Proceedings, IEEE International Electron Device Meeting, 2009, pp. 789-792.
8. A. Hajjam, A. Rahafrooz, and S. Pourkamali, "Sub-100ppb/°C temperature stability in thermally actuated high frequency silicon resonators via degenerate phosphorous doping and bias current optimization," Proceedings, IEEE International Electron Device Meeting, 2010, pp. 7.5.1-7.5.4.