Synthesis of β-Mo 2C thin films

ACS Applied Materials and Interfaces

Volumn 3, Issue 2, 2011, Pages 517-521

  Wolden, Colin A ^a   Pickerell, Anna ^a   Gawai, Trupti ^a   Parks, Sterling ^a   Hensley, Jesse ^b   Way, J Douglas ^a  

^a Department of Geology and Geological Engineering   (United States)

^b NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

Carbide; Catalyst; Oxide; Plasma enhanced chemical vapor deposition; Thin film

Indexed keywords

COMPLEX NANOSTRUCTURES; IMPURITIES IN; MOLYBDENUM CARBIDE; OPERATING PARAMETERS; OXIDATION STATE; SILICON SUBSTRATES; TWO-STEP SYNTHESIS;

CARBIDES; CHEMICAL VAPOR DEPOSITION; DEPOSITION; FILM THICKNESS; MIXTURES; MOLYBDENUM; MOLYBDENUM OXIDE; PHOTOELECTRON SPECTROSCOPY; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE FILMS;

EID: 80055063633     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am101095h     Document Type: Article

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