Folded MEMS pyramid inertial measurement unit

IEEE Sensors Journal

Volumn 11, Issue 11, 2011, Pages 2780-2789

  Zotov, Sergei A ^a   Rivers, Montgomery C ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

3 D MEMS; Inertial measurement unit (IMU); inertial sensors; microelectromechanical systems (MEMS); micromachined accelerometer; micromachined gyroscopes

Indexed keywords

3-D MEMS; INERTIAL MEASUREMENT UNIT; INERTIAL SENSOR; MICRO-MACHINED GYROSCOPE; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINED ACCELEROMETERS;

ACCELEROMETERS; ASPECT RATIO; ATMOSPHERIC PRESSURE; COMPOSITE MICROMECHANICS; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORS; THREE DIMENSIONAL;

UNITS OF MEASUREMENT;

EID: 80054928043     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2160719     Document Type: Article

References (20)

1. K. Liu et al., "The development of micro-gyroscope technology" J. Micromech. Microeng., vol. 19, no. 11, pp. 1-29, 2009.
2. M. S. Grewal, L. R.Weill, and A. P. Andrews, Global Position System, Inertial Navigation and Integration. New York: Wiley, 2001.
3. P. D. Groves, Principles of GNSS, Inertial, and Multisensor Integrated Navigation Systems, 1st ed. Norwood, MA: Artech House, Jan. 2008.
4. W. Geiger et al., "MEMS IMU for AHRS applications" in Proc. Position, Location and Navigation Symp., May 2008, pp. 225-231.
5. D. Cardarelli, "An integrated MEMS inertial measurement unit" in Proc. IEEE PLANS, 2002, pp. 314-319. (Pubitemid 34660987)
6. S. Habibi, S. J. Cooper, J.M. Stauffer, and B. Dutoit, "Gun hard inertial measurement unit based on MEMS capacitive accelerometer and rate sensor" in Proc. PLANS, May 2008, pp. 232-237.
7. M. Meng, Z. Wu, Y. Yu, Y. Ge, and Y. Ge, "Design and characterization of a six-axis accelerometer" in Proc. IEEE Conf. Robot. Autom., Apr. 2005, pp. 2356-2361. (Pubitemid 46084140)
8. M. C. Rivers, A. A. Trusov, S. A. Zotov, and A. M. Shkel, "Micro IMU utilizing folded cube approach" in Proc. IMAPS Device Packag. Conf., Mar. 2010, pp. 154-158.
9. M. C. Rivers, S. A. Zotov, A. A. Trusov, and A. M. Shkel, "Three dimensional folded MEMS technology for multi-axis sensor systems" U.S. Patent, UC Case No. 2010-527.
10. S. A. Zotov, M. C. Rivers, A. A. Trusov, and A. M. Shkel, "Chipscale IMU using folded-MEMS approach" in Proc. IEEE Sensors, Nov. 2010, pp. 1043-1046.
11. K. E. Petersen, "Silicon as a mechanical material" Proc. IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
12. A. K. Brown and Y. Lu, "Performance test results of an integrated GPS/MEMS inertial navigation package" in Proc. ION GNSS, Sept. 2004, pp. 825-832. (Pubitemid 40971056)
13. P. G. Savage, "Strapdown system computational elements" in Lecture Series Under the Sponsorship of the Sensors Electronics Technology Panel, St. Petersburg, Russia, May 2004.
14. S. Sung, J. G. Lee, T. Kang, and J. W. Song, "Development of a tunable resonant accelerometer with self-sustained oscillation loop" in Proc. IEEE Nat. Aerosp. Electron. Conf., 2000, pp. 354-361. (Pubitemid 32873275)
15. R. Hopkins, J. Miola, W. Sawyer, R. Setterlund, and B. Dow, "The silicon oscillating accelerometer:Ahigh-performanceMEMSaccelerometer for precision navigation and strategic guidance applications" in Proc. Nat. Tech. Meeting Inst. Navigation, Jan. 2005, pp. 970-979. (Pubitemid 41616090)
16. S. Sung, C. Kim, J. Park, Y. Lee, and J. Park, "Oscillation amplitudecontrolled resonant accelerometer design using a reference tracking automatic gain control" Int. J. Control, Autom., Syst., pp. 203-210, 2009.
17. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors" Proc. IEEE, vol. 86, no. 8, pp. 1640-1659, Aug. 1998.
18. M. S. Kranz and G. K. Fedder, "Micromechanical vibratory rate gyroscopes fabricated in conventional CMOS" in Proc. Symp. Gyro Technol., Sep. 1997, pp. 3.0-3.8.
19. A. A. Trusov, A. R. Schofield, and A. M. Shkel, "Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air" Sens. Actuators A, vol. 155, no. 1, pp. 16-22, Oct. 2009.
20. W. P. D'Amico, "Telemetry systems and electric gun projectiles" IEEE Trans. Magn., vol. 37, no. 1, pp. 343-346, Jan. 2001. (Pubitemid 32399927)