The silicon oscillating accelerometer: A high-performance MEMS accelerometer for precision navigation and strategic guidance applications

Proceedings of the Institute of Navigation, National Technical Meeting

Volumn , Issue , 2005, Pages 970-979

  Hopkins, R ^a   Miola, J ^a   Sawyer, W ^a   Setterlund, R ^a   Dow, B ^a  

^a Draper Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC ACCELEROMETERS (EMA); INTERCONTINENTAL BALLISTIC MISSILES (ICBM); PRECISON NAVIGATION; SILICON OSCILLATING ACCELEROMETERS;

ACCELERATION; BALLISTICS; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; MISSILES; NAVIGATION; SENSORS; SILICON;

ACCELEROMETERS;

EID: 27744608906     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. th Joint Services Data Exchange for Guidance, Navigation, and Control, Anaheim, CA, 16-20 November, 1998.
3. lh Edition, McGraw Hill, 1975.
4. Nayfeh, Mook, Nonlinear Oscillations, Wiley & Sons, New York, 1979.
5. st Century, The Boeing Co., 2002 IEEE 0-7803-7251-4/02, p. 179-188.
6. J.T. Borenstein, N.D. Gerrish, R. White, M.T. Currie and E.A. Fitzgerald, "Silicon Germanium Epitaxy: A New Material For MEMS," Mat. Res. Soc. Symp., Vol. 657, 2000, pp. 7.4.1.