Oscillation amplitude-controlled resonant accelerometer design using a reference tracking automatic gain control

International Journal of Control, Automation and Systems

Volumn 7, Issue 2, 2009, Pages 203-210

  Sung, Sangkyung ^a   Kim, Chang Joo ^a   Park, Jungkeun ^a   Lee, Young Jae ^a   Park, Joon Goo ^b  

^a Konkuk University   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Automatic gain; Oscillation; Resonant accelerometer; Self sustained

Indexed keywords

AUTOMATIC GAIN; AUTOMATIC GAIN CONTROLS; FABRICATION PROCESS; FEEDBACK CONTROLLERS; LOOP TRANSFORMATIONS; MECHANICAL STRUCTURES; OSCILLATION; OSCILLATION AMPLITUDES; REFERENCE-TRACKING; RESONANT ACCELEROMETER; SELF-SUSTAINED; SYSTEM MODELING;

GAIN CONTROL;

ACCELEROMETERS;

EID: 64849100194     PISSN: 15986446     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12555-009-0206-8     Document Type: Article

References (12)

1. T. V. Rozhart, H. Jerman, J. Drake, and C. de Cotiis, "An inertial-grade, micromachined vibrating beam accelerometer," Proc. of Transducers '95, pp. 659-662, 1995.
2. T. A. Roessig, R. Howe, A. Pisano and J. Smith, "Surface- micromachined resonant accelerometer," Proc. of Transducers '97, pp. 859-862, 1997.
3. M. A. Meldrum, "Application of vibration beam technology to digital acceleration measurement," Sensors and Actuators A; Physical, vol. A21-A23, pp. 377-380, 1990.
4. B. L. Norling, "Superflex: a synergitic combination of vibrating beam and quartz flexure accelerometer," J. of the Institute of Navigation, vol. 34, no.4, pp. 337-353, 1988.
5. W. C. Albert, "Vibrating quartz crystal beam accelerometer," Proc. of the 28th ISA International Instrumentation Symposium, pp. 33-44, 1982.
6. B. L. Lee, C. H. Oh, Y. S. Oh, and K. Chun, "A novel resonant accelerometer: variable electrostatic stiffness type," Proc. of Transducers '99, pp. 1546-1549,1999.
7. B. L. Lee, C. H. Oh, S. Lee, Y. S. Oh, and K. Chun, "A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect," Proc. of the 13th International Conf. on MEMS, pp. 352-357, 2000.
8. S. Sung, J. G Lee, B. Lee, and T. Kang, "Development of a tunable resonant accelerometer with self-sustained oscillation loop," J. of Micromech. Microeng., vol. 13, no. 3, pp. 246-253,2003.
9. H. K. Khalil, Nonlinear Systems, 2nd edition, Prentice-Hall Inc., Upper Saddle River, New Jersey, 1996.
10. Ioannou P. A., Sun J., Robust Adaptive Control, 1st edition, Prentice-Hall PTR, 1995.
11. B. Kim, C. Oh, K. Chun, T. Chung, J. Byun, and Y. Lee, "A new class of surface modifier for stiction reduction," Proc. of the 12th Int'l Conf. on MEMS, pp. 189-193, 1999.
12. S. K. Sung, C. Hyun, and J. G. Lee, "Resonant loop design and performance test for a torsional MEMS accelerometer with differential pickoff," International Journal of Control, Automation, and Systems, vol. 5, no. 1, pp. 35-42, 2007.